Semiconductor equipment precision parts made of alumina ceramics, a new benchmark for corrosion resistance and high pressure resistance
Release Time : 2025-03-24
With the rapid development of science and technology, semiconductor equipment plays a vital role in modern industry. As a key component of semiconductor equipment, the performance and quality of precision parts directly affect the operating efficiency and stability of the entire equipment. Among many materials, alumina ceramics have become a new benchmark for manufacturing semiconductor equipment precision parts with its excellent corrosion resistance and high pressure resistance.
Alumina ceramics are a ceramic material with α-type aluminum oxide as the main crystal phase, with high hardness, high mechanical strength, super wear resistance, high temperature resistance, high resistivity, good electrical insulation performance and other excellent properties. These characteristics make alumina ceramics play an irreplaceable and important role in semiconductor manufacturing production lines. Its application covers almost all semiconductor manufacturing equipment and is a key component of semiconductor production equipment.
In semiconductor equipment, precision parts need to withstand various harsh environmental conditions, such as high temperature, high pressure, and highly corrosive gases. Traditional materials often find it difficult to meet these requirements at the same time, while alumina ceramics stand out with their outstanding performance. Its excellent corrosion resistance can resist the erosion of many strong acids, strong alkalis and organic solvents, protecting parts from corrosion. At the same time, alumina ceramics are also very good at high voltage resistance, and can withstand extremely high voltages without breakdown, ensuring the stable operation of the equipment.
In addition, alumina ceramics also have the characteristics of ultra-high surface smoothness and ultra-high cleanliness. In the semiconductor manufacturing process, any tiny contamination may have a serious impact on product quality. Therefore, the surface smoothness and cleanliness of parts are extremely high. Alumina ceramics can achieve extremely high surface smoothness and reduce surface defects and the attachment of pollutants through precise processing and polishing processes. At the same time, its chemical properties are stable and it is not easy to react chemically with other substances, thereby maintaining the ultra-high cleanliness of parts.
Alumina ceramics are widely used in semiconductor equipment precision parts. For example, in the etching process, in order to reduce the contamination of wafers during plasma etching, high-purity alumina coatings or alumina ceramics with strong corrosion resistance are selected as protective materials for etching chambers and chamber linings. In the plasma cleaning process, corrosive gases containing highly reactive halogen elements such as fluorine and chlorine are used, and the gas nozzle is usually made of alumina ceramics, which are required to have high plasma resistance, dielectric strength, and strong corrosion resistance to process gases and by-products. In addition, alumina ceramics are also widely used in the manufacture of key components such as wafer carriers and ceramic robotic arms.
In recent years, with the continuous advancement of semiconductor technology, the requirements for precision parts of equipment have become higher and higher. As a new generation of high-performance materials, alumina ceramics are constantly promoting the technological upgrading and innovative development of semiconductor equipment precision parts. By optimizing the preparation process and improving the purity of the material, the impurities and defects in alumina ceramics can be further reduced, thereby improving its corrosion resistance and stability. At the same time, the application of new sintering technology and molding technology also makes the processing of alumina ceramics more precise and efficient.
In summary, alumina ceramics have become a new benchmark for semiconductor equipment precision parts with their excellent corrosion resistance and high pressure resistance. In the future development, with the continuous advancement of semiconductor technology and the continuous expansion of application fields, the application prospects of alumina ceramics in semiconductor equipment precision parts will be broader.
Alumina ceramics are a ceramic material with α-type aluminum oxide as the main crystal phase, with high hardness, high mechanical strength, super wear resistance, high temperature resistance, high resistivity, good electrical insulation performance and other excellent properties. These characteristics make alumina ceramics play an irreplaceable and important role in semiconductor manufacturing production lines. Its application covers almost all semiconductor manufacturing equipment and is a key component of semiconductor production equipment.
In semiconductor equipment, precision parts need to withstand various harsh environmental conditions, such as high temperature, high pressure, and highly corrosive gases. Traditional materials often find it difficult to meet these requirements at the same time, while alumina ceramics stand out with their outstanding performance. Its excellent corrosion resistance can resist the erosion of many strong acids, strong alkalis and organic solvents, protecting parts from corrosion. At the same time, alumina ceramics are also very good at high voltage resistance, and can withstand extremely high voltages without breakdown, ensuring the stable operation of the equipment.
In addition, alumina ceramics also have the characteristics of ultra-high surface smoothness and ultra-high cleanliness. In the semiconductor manufacturing process, any tiny contamination may have a serious impact on product quality. Therefore, the surface smoothness and cleanliness of parts are extremely high. Alumina ceramics can achieve extremely high surface smoothness and reduce surface defects and the attachment of pollutants through precise processing and polishing processes. At the same time, its chemical properties are stable and it is not easy to react chemically with other substances, thereby maintaining the ultra-high cleanliness of parts.
Alumina ceramics are widely used in semiconductor equipment precision parts. For example, in the etching process, in order to reduce the contamination of wafers during plasma etching, high-purity alumina coatings or alumina ceramics with strong corrosion resistance are selected as protective materials for etching chambers and chamber linings. In the plasma cleaning process, corrosive gases containing highly reactive halogen elements such as fluorine and chlorine are used, and the gas nozzle is usually made of alumina ceramics, which are required to have high plasma resistance, dielectric strength, and strong corrosion resistance to process gases and by-products. In addition, alumina ceramics are also widely used in the manufacture of key components such as wafer carriers and ceramic robotic arms.
In recent years, with the continuous advancement of semiconductor technology, the requirements for precision parts of equipment have become higher and higher. As a new generation of high-performance materials, alumina ceramics are constantly promoting the technological upgrading and innovative development of semiconductor equipment precision parts. By optimizing the preparation process and improving the purity of the material, the impurities and defects in alumina ceramics can be further reduced, thereby improving its corrosion resistance and stability. At the same time, the application of new sintering technology and molding technology also makes the processing of alumina ceramics more precise and efficient.
In summary, alumina ceramics have become a new benchmark for semiconductor equipment precision parts with their excellent corrosion resistance and high pressure resistance. In the future development, with the continuous advancement of semiconductor technology and the continuous expansion of application fields, the application prospects of alumina ceramics in semiconductor equipment precision parts will be broader.